Fewer than one in nine civil servants is planning to move with their jobs under the decentralisation programme, according to figures provided by Government departments.
Details from a series of parliamentary questions tabled by Fine Gael show that out of 7,400 posts being decentralised, 753 civil servants are willing to move with their posts.
The figures do not include officials willing to decentralise to other departments or agencies or to another unit within their own organisation.
Fine Gael finance spokesman Richard Bruton, who obtained the information, said the "potential loss of experience and knowledge by these agencies and units is alarming".
The figures also showed that in one State body, Pobal, which is due to begin to decentralise to Clifden next year, not one of the 40 staff is willing to move.
As a result, a national advertising campaign was launched to fill the 10 posts that will first decentralise next year.
In An Bord Iascaigh Mhara and Fáilte Ireland, none of the existing staff was willing to decentralise to new offices in Clonakilty and Killarney, respectively.
Of the 210 staff in the Ordnance Survey of Ireland, 15 are willing to move to Dungarvan.
A total of 13 of the existing 123 staff at Development Co-operation Ireland, which operates the Government's €500 million overseas development aid programme, are willing to move to new offices in Limerick, although a further three are willing to move from within the wider Department of Foreign Affairs.
"Some of these are very specialist jobs, therefore this poses a very serious threat to State services," Mr Bruton said.
He was also concerned individual departments still had "no idea whatsoever" of the likely decentralisation costs in terms of retraining, recruitment and transition.
He also said the figures indicated that upwards of 5,000 civil servants in the 10,000 posts that are being decentralised had no intention of leaving Dublin.
Of the departmental headquarters that are moving out of Dublin, only a small proportion of existing staff are willing to move.
He accused the Government of making "a botched job" and called on the Government to review its current plans.
In the Department of Tourism, which is to be decentralised to Killarney within the next two years, nine of the 130 existing staff are willing to move there, although the department states there are sufficient applications from other departments and State agencies to fill the remaining 121 posts.
The Department of Social and Family Affairs has one of the highest take-ups. A total of 221 staff are willing to move within their existing units, while 331 Dublin staff are willing to move.